000 00497nam a22001817a 4500
003 OSt
005 20230320040600.0
008 170426b xxu||||| |||| 00| 0 eng d
020 _a140204934
040 _aMMU
_beng
_cMMU
_dMMU
050 _aTK7874 .Z427 2006
245 _aMechanics of microelectronics/
_cZhang, G. Q.
260 _aNetherlands :
_bSpringer,
_c2006
300 _axiii, 563 p.:
500 _aIncludes index
650 _aMechanics of microelectronics
942 _2lcc
_cLOAN LOAN
999 _c27221
_d27220