TY  - BOOK
AU  - Ghandhi Sorab K.
TI  - VLSI Fabrication Principles: silicon and gallium arsenide
SN  - 9788126517909
AV  - TK874 .G473 1994  
PY  - 1994///
CY  - New Delhi
PB  - Wiley
N1  - includes index
ER  -